EQUIPMENT
EQUIPMENT
EQUIPMENT
EQUIPMENT
MATERIAL & TESTING ROOM
UV Laser Marker
Scanning Acoustic Tomograph (SAT)
Microscopic Raman Spectroscope
Linear Motor Driven Fatigue Tester
Semiconductor Device Analyzer
3-source DC/RF Sputtering Apparatus (Depo-down 3 inch cathode)
3-source DC Sputtering Apparatus (Depo-down 2 inch cathode)
3-source DC Sputtering Apparatus (Depo-up 2 inch cathode)
Small Evaporator
Bonding Equipment
Infrared Introduction Heating System
Semi-auto Desktop Wire Bonder
Bending Tester
Bending-torsion Tensile Tester
Focused Ion Beam (FIB）
Thin Film Tensile Test System
Chamber Tensile Test System
Field- emission Scanning Electron Microscope (FE-SEM）
Nanoindenter
Disital Microscope & High Speed Camera
Energy Dispersive X-ray Spectroscopy
Atomic Force Microsope (AFM)
Probe System & Nanomanipulation System
４-inch Pressure and Heat bonding System
MICROFABRICATION ROOM
Gas Cylinder Storage
Zetasizer Nano ZS
Double-side Mask Aligner
Dry Etching System (RIE)
Small Thermal Oxidation Furnace (for 4 inch & 2 inch)
Fume Hood
Nanoparticles Organization
Clean Bench
Dicing Machine
Polishing Machine
Ion Milling Equioment
Differential Scanning Calorimetry (DSC)
Dry Oven
Centrifuge
Atomic Force Microscope (AFM)
Thermal Shock Chambe
Cutting Machine
UV visible light spectrophotometer
CLEAN BOOTH
Versatile High-definition 3D Stereolithography Equipment
Digital Microscope
Ultra-depth Multi-angle Observation System
Magnetic Sputtering Apparatus
Bio Clean Bench
Safety Freezer/Refrigerator
NAMAZU LABORATORY
Kyoto University of Advanced Science (KUAS)
18 Yamanouchi-gotanda-cho, Ukyo-ku, Kyoto 〠 615-8577, Japan
TEL & FAX: +81-75-496-6506