MATERIAL & TESTING ROOM
South Building, 5th Floor SLab 504
South Building, 5th Floor SLab 504
UV Laser Marker
Scanning Acoustic Tomography (SAT) System
Raman Spectroscope
Linear Motor-Driven Fatigue Testing Machine
Triple-Source DC/RF Sputtering System (Downward, 3-inch)
Triple-Source DC Sputtering System (Downward, 2-inch)
Triple-Source DC Sputtering System (Upward, 2-inch)
Bonding System
4-Inch Heated Compression Bonding System
Infrared Rapid Thermal Annealing (RTA) System
Semi-Automatic Desktop Wire Bonder
Bending Test System(custom)
Combined Bending–Torsion–Tension Test System(custom)
Focused Ion Beam (FIB) Processing System
Biaxial Tensile Testing System for Thin Films(custom)
Chamber Tensile Testing System(custom)
Field-Emission Scanning Electron Microscope (FE-SEM)
Digital Microscope & High-Speed Camera
Energy-Dispersive X-ray Spectroscopy (EDX) System
Atomic Force Microscope（AFM）
Probe System & Micromanipulation Stage
MICROFABRICATION ROOM
South Building, 5th Floor SLab 505
South Building, 5th Floor SLab 505
Ultra-Micro Indentation Hardness Tester
Ultra-Micro Indentation Hardness Tester
Zetasizer Nano ZS
High-Pressure Gas Cylinder Storage
Double-Sided Mask Aligner and Exposure System
Reactive Ion Etching (RIE) System (Dry Etching System)
Drafting Table (Drafter)
Nanoparticle Synthesis System
Clean Bench
Dicing Saw
Polishing System
High-Temperature Differential Scanning Calorimeter (DSC)
Dry Oven
Centrifuge
Compact Thermal Shock Chamber
Precision Cutting Machine for Microstructured Materials
UV-Visible Spectrophotometer
Ion Milling System
Atomic Force Microscope（AFM）
Compact Tube Furnace
CLEAN BOOTH
High-Resolution Multi-Purpose 3D Photolithography System
Digital Microscope
Ultra-Deep Multi-Angle Observation System
Magnetron Sputtering System
Bio Clean Bench
Explosion-Proof Laboratory Refrigerator-Freezer