- EQUIPMENT 
 Department of Mechanical and Electrical System Engineering
   The 5th floor of South Building, Lab. 504
 
   Department of Mechanical and Electrical System Engineering
   The 5th floor of South Building, Lab. 505
  
   Department of Mechanical and Electrical System Engineering
   The 1st floor of South Building, Science Plaza
 
 
 

 LABORATORY 1. <Department of Mechanical and Electrical System Engineering, the 5th Floor of South BuildingLab. 504>

    There are some self-produced apparatuses obtaining mechanical properties or processing Micro and Nano-materials.
 
 
 

 
 Equipment List  

   1. UV Laser Marker
   2. Scanning Acoustic Tomograph(SAT)
   3. Microscopic Raman Spectroscope
   4. Linear Motor Driven Fatigue Tester
   5. Simple SEM
   6. 3-source DC/RF Sputtering Apparatus (Depo-down 3 inch cathode)
   7. 3-source DC Sputtering Apparatus (Depo-down 2 inch cathode)
   8. 3-source DC Sputtering Apparatus (Depo-up 2 inch cathode)
   9. Small Evaporator
   10. Bonding Equipment
   11. Infrared Introduction Heating System
   12. Layser Bonding Equipment
 

 

 
    13. Semi-auto Desktop Wire Bonder
   14. Bending Tester
   15. Bending-torsion Tensile Tester
   16. Focused Ion Beam (FIB)
   17. Thin Film Tensile Test System
   18. Field-Emission Scanning Electron Microscope (FE-SEM)
   19. Nanoindenter
   20. Digital Microscope & High Speed Camera
   21. Energy Dispersive X-ray Spectroscopy (EDX)
   22. Atomic Force Microscope (AFM)
   23. Probe System & Nanomanipulation System
 24. Semiconductor Device Analyser
   

 

 

 LABORATORY 2. <Department of Mechanical and Electrical System Engineering, the 5th Floor of South BuildingLab. 505>

   The laboratory has some facilities for processing thin film specimens or MEMS devices as a cleanroom. 
 
 
 
 

    Equipment List   

   1. Gas Cylinder Storage
   2. Double-side Mask Aligner
   3. Dry Etching System (RIE)
   4. Small Thermal Oxidation Furnace (for 4-inch)
   5. Small Thermal Oxidation Furnace (for 2-inch)
   6. Fume Hood
   7. Nanoparticles Organization
   8. Clean Bench
   9. Chemical Storage
 

  

   10. Ion Milling Equipment
   11. Polishing Machine
   12. Differential Scanning Calorimetry (DSC)
   13. Dicing Machine 
   14. Air Shower
   15. Dry Oven
   16. Centrifuge
   17. Zetasizer 
   18. Atomic Force Microscope (AFM)