- RESEARCH 
Our research is focused on "Micro and Nanomaterials" used for an essential in assembling as a NMEMS(Nano Micro Electro Mechanical Systems). We have our own experimental technological development. As a major research, we are making a strong effort to research for a deposition of thin film, an evaluation and analysis technological development, a mechanical property measurement of Nanomaterials, and a manufacture of Nano particles with exothermic reaction function or a special function material. Our research is broadly divided four groups as follow.
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1.3D Nano Processing Technological Development
 
We are researching freely processing technological development in three dimensions with nanomaterials of silicon or carbon. For example, in the research using a FIB(Focused Ion-beam), freely manufacturing technology of carbon or tungsten nanostructure by using a FIB-CVD (Focused Ion-beam assisted chemical vapor deposition), and a freely bending technology of silicon membrane named "Silicon Origami" by controlling FIB gallium ion with different doses. In others, silicon nanowire manufacturing technology by using a local anodic oxidation processing of a conductivity probe of AFM(Atomic force microscope), in addition, a plasticity processing technology by using a torsion deformation. 
  
3D Nano Processing Technology Development3D Nano Processing Technology Development
FIB-CVD technology 
Si Nanowires by using FIB
 Si nanowaires by using FIB (width 17nm)
 
Si Airplane as Silicon Origami by FIB
 Si airplane as "Silicon Origami" by using FIB
 
Sacrificial Oxidation Si Nano Pillar
 Sacrificial oxidation Si nano pillar
 
Si Cantilever
 Si cantilever
2.Evaluation Technological Development for Nanomaterials
 
Mechanical Reliability of Nanomaterials could be directly evaluated in-situ SEM(Scanning Electron Microscope) by making full use of MEMS technology with an original tensile tester system.
By designing and producing a MEMS device with an electrostatic actuator and an electrostatic capacitance sensor, a nano-wired specimen could be conducted the tensile test in-situ SEM by the original experimental system of SEM. Carbon Nanotubes, Silicon Nanowires, Insulating Nano Thin Films, Super Steel Nanorods have evaluated in our laboratory so far. In the research of Silicon Nanowires, an influence of processing damage by FIB and a vacuum annealing effect under an influence of mechanical property are experimentally evaluated. Recently, Young's modulus and tensile strength of a single-walled Carbon Nanotubes with a diameter of 1 to 3 nm were measured, moreover the correlation between Nanotube structure and the mechanical property was successfully obtained. 
 
 
   
ナノ材料の評価技術の開発ナノ材料の評価技術の開発
MEMS device 
Carbon Nanotubes
Carbon nanotubes
 
CNT picking up technique
CNT picking up technique
 
In-situ SEM MEMS tensile system
In-situ SEM MEMS tensile system  
In-situ SEM manipulator
In-situ SEM manipulator  
3.Evaluation Technological Development for Micro-materials
 
Our laboratory is originally developing a various experimental technology with a target of thin films or microrods. For example, we have some self-produced experimental equipment; Thin-film evaluation technologies such as uniaxial/in-plane biaxial tensile test equipment, Poisson's ratio evaluation equipment, Tensile test equipment in-situ SEM, Strength measurement equipment for microrods with joints, combined tensile, bending, and torsion test equipment for micro torsion bars, and impact test equipment for MEMS structures. We have substantial experience in measuring mechanical properties (Young's modulus, Poisson's ratio, Fracture strength, Bond strength, Creep, Stress relaxation, Fatigue, etc.) of silicon-based film materials, various metal films, and polymer films.Our laboratory's strong point is that we could design and develop our own mechanical loading devices for micro material evaluation. 
 
  
 
Microscale pure torsion testMicroscale pure torsion test
Microscale pure torsion test 
Bonding strength tester
Bonding strength tester
 
Thin film in-plane biaxial tensile tester
Thin film in-plane biaxial tensile tester
 
Specimen for tensile of thin film
Specimen for tensile test of thin film
 
MEMS resonance fatigue tester
MEMS resonance fatigue tester  
4.Development of Exothermic Materials
 
Our laboratory could produce Multilayer films which is sputtered different types of metals with nano-thickness by using an original self-produced Multi-source sputtering equipment. When a multilayer film made of a combination of light and transition metals (e.g., aluminum and nickel) is externally micro-stimulated, an exothermic reaction occurs due to alloying. Since this exothermic material could raise its temperature instantaneously and locally, it is expected to have various applications such as a heat source for solder joints. Recently, we have succeeded in developing a sensitive heat-generating material that reacts just by poking it with tweezers, and heat-generating microparticles that are three-dimensionally molded in nano- to sub-millimeter sizes. We believe that heat-generating multilayers and heat-generating microparticles are attractive local instantaneous heat-generating materials, and we are conducting application research based on their features.
 
 
 
Al/Ni multilayer film with exothermic reactionAl/Ni multilayer film with exothermic reaction
Al/Ni multilayer film with exothermic reaction 
Instant solder joint of exothermic multilayer film
Instant solder joint of exothermic multilayer film
 
Porous nano particles
 Porous nano particles
Power injection molding exothermic micro particles
 Powder injection molding exothermic micro particles
Exothermic reaction with exothermic nano particles
Exothermic reaction with exothemic nano particles