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MATERIAL & TESTING ROOM

Faculty of Engineering, Department of Mechanical and Electrical Systems Engineering
South Building, 5th Floor [SLab. 504]
　　

MICROFABRICATION ROOM

Faculty of Engineering, Department of Mechanical and Electrical Systems Engineering
South Building, 5th Floor [SLab. 505]
　   A Laboratory for Micro/Nano Material Processing and Mechanical Property Evaluation
　   Equipment List
  
　  A Cleanroom for the Fabrication of MEMS Devices and Other Micro/Nano Structures
　   Equipment List
  
  
UV Laser Marker
Scanning Acoustic Tomography (SAT) System
Raman Spectroscope
Linear Motor-Driven Fatigue Testing Machine
Triple-Source DC/RF Sputtering System (Downward, 3-inch)
Triple-Source DC Sputtering System (Downward, 2-inch)
Triple-Source DC Sputtering System (Upward, 2-inch)
Bonding System
4-Inch Heated Compression Bonding System
Infrared Rapid Thermal Annealing (RTA) System
Semi-Automatic Desktop Wire Bonder
Custom-Made Bending Test System
Custom-Made Combined Bending–Torsion–Tension Test System
Focused Ion Beam (FIB) Processing System
Custom-Made Biaxial Tensile Testing System for Thin Films
Custom-Made Chamber Tensile Testing System
Field-Emission Scanning Electron Microscope (FE-SEM)
Digital Microscope & High-Speed Camera
Energy-Dispersive X-ray Spectroscopy (EDX) System
Atomic Force Microscope（AFM）
Probe System & Micromanipulation Stage
 
 
Ultra-Micro Indentation Hardness Tester
Ultra-Micro Indentation Hardness Tester
Zetasizer Nano ZS
High-Pressure Gas Cylinder Storage
Double-Sided Mask Aligner and Exposure System
Reactive Ion Etching (RIE) System (Dry Etching System)
Compact Tube Furnace
Drafting Table (Drafter)
Nanoparticle Synthesis System
Clean Bench
Dicing Saw
Polishing System
Ion Milling System
High-Temperature Differential Scanning Calorimeter (DSC)
Dry Oven
Centrifuge
Atomic Force Microscope（AFM）
Compact Thermal Shock Chamber
Precision Cutting Machine for Microstructured Materials
UV-Visible Spectrophotometer
  
MATERIAL & TESTING ROOM  
Faculty of Engineering, Department of Mechanical and Electrical Systems Engineering
South Building, 5th Floor [SLab. 504]
A Laboratory for Micro/Nano Material Processing and Mechanical Property Evaluation
  Equipment List
  
  • UV Laser Marker
  • Scanning Acoustic Tomography (SAT) System
  • Raman Spectroscope
  • Linear Motor-Driven Fatigue Testing Machine
  • Triple-Source DC/RF Sputtering System (Downward, 3-inch)
  • Triple-Source DC Sputtering System (Downward, 2-inch)
  • Triple-Source DC Sputtering System (Upward, 2-inch)
  • Bonding System
  • 4-Inch Heated Compression Bonding System
  • Infrared Rapid Thermal Annealing (RTA) System
  • Semi-Automatic Desktop Wire Bonder
  • Custom-Made Bending Test System
  • Custom-Made Combined Bending–Torsion–Tension Test System
  • Focused Ion Beam (FIB) Processing System
  • Custom-Made Biaxial Tensile Testing System for Thin Films
  • Custom-Made Chamber Tensile Testing System
  • Field-Emission Scanning Electron Microscope (FE-SEM)
  • Digital Microscope & High-Speed Camera
  • Energy-Dispersive X-ray Spectroscopy (EDX) System
  • Atomic Force Microscope（AFM）
  • Probe System & Micromanipulation Stage
 
MICROFABRICATION ROOM
Faculty of Engineering, Department of Mechanical and Electrical Systems Engineering
South Building, 5th Floor [SLab. 505]
 
A Cleanroom for the Fabrication of MEMS Devices and Other Micro/Nano Structures
  List of Equipment
　　 
  
  • Ultra-Micro Indentation Hardness Tester
  • Ultra-Micro Indentation Hardness Tester
  • Zetasizer Nano ZS
  • High-Pressure Gas Cylinder Storage
  • Double-Sided Mask Aligner and Exposure System
  • Reactive Ion Etching (RIE) System (Dry Etching System)
  • Compact Tube Furnace
  • Drafting Table (Drafter)
  • Nanoparticle Synthesis System
  • Clean Bench
  • Dicing Saw
  • Polishing System
  • Ion Milling System
  • High-Temperature Differential Scanning Calorimeter (DSC)
  • Dry Oven
  • Centrifuge
  • Atomic Force Microscope（AFM）
  • Compact Thermal Shock Chamber
  • Precision Cutting Machine for Microstructured Materials
  • UV-Visible Spectrophotometer
 

CLEAN BOOTH

Shared Facilities
South Building, 1th Floor [Mechanical Workshop]
 
Digital Microscope
Ultra-Deep Multi-Angle Observation System
Magnetron Sputtering System
Bio Clean Bench
Explosion-Proof Refrigerator-Freezer (for Laboratory Use)
 
    
    Clean Booth, Faculty of Engineering
 　  List of Equipment
   
CLEAN BOOTH
Shared Facilities, South Building, 1th Floor [Mechanical Workshop]
 
Clean Booth, Faculty of Engineering
  List of Equipment
   

 

  • Digital Microscope
  • Ultra-Deep Multi-Angle Observation System
  • Magnetron Sputtering System
  • Bio Clean Bench
  • Explosion-Proof Refrigerator-Freezer (for Laboratory Use)